SPUTTERING

Before
1: S
ar, beam, still, up
2: SU
cathode, ion, bias, during, after
2: US
dc
3: SUU
chemical, physical
3: USU
reactive
4: UUSU
preferential
After
1: S
yield, yields, gas, rate, rates, sound, time, out
2: SU
candle, targets, chamber, target, process, method, system, pressure, systems, power
2: US
technique, techniques
3: SUU
processes
3: USU
conditions
4: UUSU
deposition
Surrounder Phrases
dc magnetron, bias, coefficient, machine, power, plasma, discharge, source, beam, noise, parametersargon laser, ion, ar, plasma, gas, beam, pressure, methodtriode vacuumdiode laser, bias, parameterslaser diode, beam, induced, deposition, light, frequency, plasma, technology, energy, threshold, gun, sources, power, source, parameters, systems, thermal, device, techniques, apparatus, system, ion, technique, noise, discharge, equipment, axisreactive magnetron, ion, power, gas, metal, chemical, deposition, systems, plasma, processes, surface, effectscandle flame, flames, light, powermachine gun, parametersion beam, laser, selective, source, yields, chamber, yield, sources, energy, induced, gun, plasma, deposition, thermal, engine, chemicalpartial differential, pressure, vacuum, dischargevacuum chamber, deposition, diode, apparatus, oil, pressure, system, energy, systems, conditions, device, plasma, technology, gas, equipment, source, technique, techniquesmetal ion, deposition, surface, cathodecathodic deposition, processes, processplasma torch, deposition, frequency, parameters, discharge, ion, chamber, flame, gas, gun, source, sourcesar ion, laser, plasma, gas, parameters, method, pressure, process, processes, systemscathode discharge, surface, plasma, chamber, gastorch flame, beam, lightthermal noise, energy, plasma, coefficient, vacuum, effects, power, parameters, processes, discharge, conditionselectronic equipment, device, systems, noise, apparatus, technology, sources, engine, energy, beamdifferential thermal, effects, pressure, rates, coefficient, threshold, effect, techniquegun fire, metal, awaybeam axis, deposition, induced, energy, apparatus, laser, parameters, depth, ion, engine, technique, techniques, plasmagas chamber, flame, argon, discharge, pressure, engine, torch, flames, laser, oil, plasma, gunrelative frequency, rates, yieldslow frequency, threshold, pressure, thermal, yields, rates, energy, noise, plasma, flame, yield, rate, coefficient, relative, powerdeposition rates, rate, chamber, occurs, parameters, processes, techniques, technique, process, conditions, method, methodsfire engine, apparatus, starteddischarge coefficient, plasma, chamber, rates, rate, pressure, occurs, frequency, parameterspreferential rates, deposition, rateengine noise, oil, vacuum, started, technology, powerselective ion, deposition, laser, pressure, bias, chemical, processes, effects, processlight beam, candles, source, sources, energyhigher yields, rates, frequency, rate, yield, threshold, energy, thermal, plasma, powerhigh frequency, vacuum, rates, yields, pressure, technology, yield, thermal, rate, energy, threshold, plasmachemical processes, energy, parameters, methods, technology, apparatus, deposition, laser, processenergy sources, deposition, source, ion, threshold, systems, yieldconventional methods, techniques, diode, method, thermal, sources, dc, ion, laser, vacuum, energy, oil, chemical, machine, technique, electronic, systemspressure differential, coefficient, chamber, induced, gasnoise sources, induced, source, power, threshold, parametersfrequency selective, noise, axis, soundlower rates, threshold, yields, frequency, chamber, rate, energy, plasma, yield, surface, thermaloccurs during, after, alongpower vacuum, diode, source, laser, differentialtotal energy, yield, plasma, ion, pressure, differentialphysical parameters, processes, conditions, devicesound effects, pressure, source, beam, sources, equipment, camemethod yieldschamber pressure, depth, vacuumrate coefficient, differentialcame out, up, alongthreshold energy, frequency, effects, parameters, effectyield coefficient, surface, differentialtechnique yields, usingdifferent methods, sources, rates, techniquesusing conventional, argon, laser, electronicdevice parameters, technologyinduced plasma, thermal, noise, deposition, effects, chemicaltarget machine, device, chamber, surfacebias occurs, induced, conditionsflames begantypical diode, laser, thermalkept up, awaystarted out, up, usingsurface energy, pressureoil pressureprocess occurs, parameters, yieldsaxis along, depth, yieldsafter dischargeduring depositioneffects inducedeffect occurssystem parameterssystems usingflame surfaceyields higherstill kept